Optical properties of silicon-implanted polycrystalline diamond membranes

Optical properties of polycrystalline diamond films in the far-infrared

Room temperature Fourier transform spectroscopic transmissivity data in the far-infrared (10 360 cm-1) were used to derive a model for the complex refractive index (n ik) of polycrystalline diamond films grown by microwave plasma enhanced chemical vapor deposition. Transmission measurements were also made at a frequency of 19.5 cm-1 utilizing a CO2 optically pumped submillimeter laser. Due to t...

Optical properties of erbium-implanted porous silicon microcavities

control of the optical properties of nanoparticles by laser fields

در این پایان نامه، درهمتنیدگی بین یک سیستم نقطه کوانتومی دوگانه(مولکول نقطه کوانتومی) و میدان مورد مطالعه قرار گرفته است. از آنتروپی ون نیومن به عنوان ابزاری برای بررسی درهمتنیدگی بین اتم و میدان استفاده شده و تاثیر پارامترهای مختلف، نظیر تونل زنی(که توسط تغییر ولتاژ ایجاد می شود)، شدت میدان و نسبت دو گسیل خودبخودی بر رفتار درجه درهمتنیدگی سیستم بررسی شده اشت.با تغییر هر یک از این پارامترها، در...

In-Situ Optical Metrology of Polycrystalline Silicon

Accurate characterization of polycrystalline silicon (polysilicon) is not only a critical monitoring technique for chemical vapor deposition (CVD) process control, but also a necessity for gate line-width control in i-line/DUV lithography and dry etching. It requires that the thickness, refractive index and extinction coefficients (from DUV to near red) in polysilicon films be precisely and rap...

Redistribution of implanted species in polycrystalline silicon films on silicon substrate

Redistributions of implanted species after thermal annealing in polycrystalline silicon (poly-silicon) were studied by secondary ion mass spectrometry. Ten different elements were implanted into poly-silicon films grown on Si substrates. The implanted energies were chosen such that the expected ion range is within the poly-silicon film. Thermal anneals were carried out at temperatures between 3...